TECHNOLOGY
Our sensors are based on film bulk acoustic resonator (FBAR) technology. The devices, fabricated on a silicon wafer, comprise a thin film of piezoelectric material that is made to resonate. Attachment of mass to the surface changes the resonant frequency and provides an extremely accurate measurement of the amount of mass on the sensing area.
APPLICATIONS
Our sensors are suited to applications where you need to detect small masses in a device with an extremely small form factor. Functionalising the surface of our devices means that they can selectively detect specific targets.
Thin film metrology
Particulate monitoring
Gas detection
FEATURES
Sorex Sensors FBAR technology displays several advantages
Dual mode
Simultaneous measurement of mass attachment and temperature
Mass sensitivity
Capable of measuring mass down to the femtogram range
Temperature sensitivity
Capable of measuring temperature with a resolution down to 0.2 °C
Foundry fabrication
Fabrication can be made on silicon wafers using standard foundry processes at low cost
Reduced size
Devices with a sensing area of ∼ 100 µm x 100 µm that can be fabricated as an array of 20 sensors in a 4 mm x 4 mm silicon die
Low power
Very low power consumption ∼ µW
CONTACT
contact@sorexsensors.com
Sorex Sensors - offices
Sorex Sensors Limited
Maxwell Centre - University of Cambridge
JJ Thomson Avenue
Cambridge CB3 0HE
Sorex Sensors - registered office
Sorex Sensors Limited
CRN. 10544126
c/o Hardcastle Burton LLP,
Lake House, Market Hill,
Royston, Herts, SG8 9JN