Our sensors are based on film bulk acoustic resonator (FBAR) technology. The devices, fabricated on a silicon wafer, comprise a thin film of piezoelectric material that is made to resonate. Attachment of mass to the surface changes the resonant frequency and provides an extremely accurate measurement of the amount of mass on the sensing area.


Our sensors are suited to applications where you need to detect small masses in a device with an extremely small form factor. Functionalising the surface of our devices means that they can selectively detect specific targets.

Thin film metrology

Particulate monitoring

Gas detection


Sorex Sensors FBAR technology displays several advantages

Dual mode

Simultaneous measurement of mass attachment and temperature

Mass sensitivity

Capable of measuring mass down to the femtogram range 

Temperature sensitivity

Capable of measuring temperature with a resolution down to 0.2 °C

Foundry fabrication

Fabrication can be made on silicon wafers using standard foundry processes at low cost

Reduced size

Devices with a sensing area of ∼ 100 µm x 100 µm that can be fabricated as an array of 20 sensors in a 4 mm x 4 mm silicon die 

Low power

Very low power consumption ∼ µW


Sorex Sensors - offices

Sorex Sensors Limited

Maxwell Centre - University of Cambridge

JJ Thomson Avenue
Cambridge CB3 0HE

Sorex Sensors - registered office

Sorex Sensors Limited
CRN. 10544126

c/o Hardcastle Burton LLP,
Lake House, Market Hill,
Royston, Herts, SG8 9JN